A new junction termination technique: The Deep Trench Termination (DT2)
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چکیده
Numerous techniques have been used to improve the voltage handling capability of high voltage power devices with the aim to obtain the breakdown of a plane junction. In this work, a new concept of low cost, low surface and high efficiency junction termination for power devices is presented and experimentally validated. This termination is based on a large and deep trench filled by BCB (BenzoCycloButene) associated to a field plate. Simulation results show the important impact of trench design and field plate width on termination performances. The experimental breakdown voltage of this Deep Trench Termination (DT) is close to 1300 Volts: this value validates not only the concept of the DT but also the choice of the BCB as a good dielectric material for this termination.
منابع مشابه
Mechanical stress investigation after technological process in Deep Trench Termination DT2 using BenzoCycloButene as dielectric material
Article history: Received 24 May 2015 Received in revised form 22 June 2015 Accepted 2 July 2015 Available online xxxx Mechanical residual stress after technological process has been investigated on 1200 V Deep Trench Termination Diode. The dielectric used to fill the trenches was the BenzoCycloButene (BCB). Four years after the fabrication and storage in a clean roomwithout any electrical or t...
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تاریخ انتشار 2017